A typical MEMS structure contains moving masses, springs, and dampeners, which work in the similar way as the mass-spring model. The sensors can add an intuitive man-machine interface to a mobile ...

This 3D information can be used to obtain very accurate and repeatable height measurements for a step within a MEMS structure. The added advantage of a full 3D representation of the surface is the ...

Bulk micromachining involves etching a structure into the silicon wafer substrate. Surface micromachining involves depositing and etching layers one on top of another. MEMS production equipment is ...