MEMS (micro electromechanical systems) based on semiconductor microfabrication play important roles for example in the periphery of IT systems. They are value-added but not cost effective in many ...

Wafer processing equipment makes micro-electro-mechanical systems through bulk or surface micromachining. Bulk micromachining involves etching a structure into the silicon wafer substrate. Surface ...

This technology is firmly based on a unique manufacturing paradigm, micromachining. Micromachining is a core technology that enables the MEMS and related new approaches in engineering and science.